Authors: S. Shikata, K. Yamaguchi, A. Fujiwara, Y. Tamenori, J. Yahiro, M. Kunisu, T. Yamada Abstract: X-ray absorption fine structure (XANES) measurements were carried out for P doped (111) and (001) diamond films, and the results were compared with those from simulations. For the (111) spectrum, the main strong peak observed at 2147.0 eV and three broad peaks centered at 2150 eV, 2157 eV, and 2165 eV were observed. The assignment with the estimation by the simulation of the XANES peaks showed the interstitial sites additional to the substitutional site. The Extended X-ray Absorption Fine Structure (EXAFS) result of the P doped (111) diamond showed that the first and second neighboring peaks are observed at 1.21 A and 2.0 A, respectively. The assignment with the estimation by the simulation of the EXAFS peaks also showed the interstitial sites additional to the substitutional site. Overall, P in diamonds presumably has dopant sites in both the substitutional and interstitial sites. Link: Appl. Phys. Lett. 110 (2017) 072106-1 - 072106-4. DOI: 10.1063/1.4975062